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Etc. > Etc. : Wafer Thickness Measuring Machine
Wafer Thickness Measuring Machine
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VIMTEC`s Special Model

Wafer Thickness Measuring Machine

VIMTEC also customize measuring machines with specifications required by customers if standard measuring devices do not meet their needs.

Adjustable areas -
Measuring methods
Size of measuring device
Structure of measuring device
Measuring device for specific products
Change in environment where a measuring device is used

Possible applications -
Flatness of flat-panel display glass
Thickness of flat-panel display glass
Thickness of wafer during processing
Shape measuring machine with laser sensor
Measuring Size of delicate holes

This device is designed for precise measurement of wafer thickness that cannot be measured with a 3D measuring instrument.
A vacuum absorption system is built in to fix wafer.
All sides of wafer are measured simultaneously in X and Y stages.
Measurement and printing are automatic

 

Sensor

Laser

Measuring Range

4", 8"

Resolution

0.01um

Accuracy

2§­ or below

Drive System

X,Y Servo Motor

Application

Wafer thickness


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÷ºÎÆÄÀÏ WaferThicknessMeasuringMachine.pdf